Since 1968 - Leaders in Laboratory Instrumentation & Support

Microscopy - MATERIAL SCIENCE - Electron Microprobes - LEXES

EX-300

CAMECA's new generation Shallow Probe: the metrology solution for advanced integration of new processes.

 

Front-end semiconductor compositional metrology solution for 22nm node and beyond

 

CAMECA's EX-300 is a unique LEXES based metrology tool supporting major semiconductor developments since the 90nm node era and following up the integration of the most diverse materials. It accelerates the time-to-market of your logic and memory devices and increases the integrated yield of your high volume production.

 

http://www.cameca.com/products/lexes/ex-300-shallow-probe

Enquiry Email: webenquiry@wirsam.com

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